On the reactivity of silver electrodes in a chlorine radiofrequency plasma - Plasma oxidation vs. thermal oxidation - Research portal of Justus Liebig University Giessen:

Journal article

On the reactivity of silver electrodes in a chlorine radiofrequency plasma - Plasma oxidation vs. thermal oxidation

Authors list: Vennekamp, M; Janek, J

Publication year: 2003

Pages: 1851-1862

Journal: Journal of Inorganic and General Chemistry

Volume number: 629

Issue number: 10

ISSN: 0044-2313

eISSN: 1521-3749

DOI Link: https://doi.org/10.1002/zaac.200300137

Publisher: Wiley

Abstract:
The plasma-electrochemical growth of an ion-conducting film by the oxidation of a metal in an electronegative plasma is investigated and compared with results from thermal oxidation. As model system we studied the oxidation kinetics of silver electrodes in a Cl-2 rf plasma. The electrochemical control of the reaction by external currents through the product layer using the plasma as a fluid electrode was achieved. Both potentiostatic and galvanostatic control of the reaction was applied. The morphology of the product layer and its temporal evolution was investigated using SEM, A formation of silver chloride surface patterns in the oxidation pro-cess takes place if a simple stability criterion is not fulfilled. Specific surface morphologies were found under different experimental conditions. The morphology of the product layer is influenced by the external electric current and the substrate temperature. The influence of the plasma phase on the thermodynamics and kinetics of the oxidation process is discussed. The role of excited plasma species, the electrical charging of the surface and radiation from the plasma are taken into account.

Authors/Editors

- Uni.-Prof. Dr. Jürgen Janek

Citation Styles

Harvard Citation style: Vennekamp, M. and Janek, J. (2003) On the reactivity of silver electrodes in a chlorine radiofrequency plasma - Plasma oxidation vs. thermal oxidation, Zeitschrift für anorganische und allgemeine Chemie = Journal of Inorganic and General Chemistry, 629(10), pp. 1851-1862. https://doi.org/10.1002/zaac.200300137

APA Citation style: Vennekamp, M., & Janek, J. (2003). On the reactivity of silver electrodes in a chlorine radiofrequency plasma - Plasma oxidation vs. thermal oxidation. Zeitschrift für anorganische und allgemeine Chemie = Journal of Inorganic and General Chemistry. 629(10), 1851-1862. https://doi.org/10.1002/zaac.200300137