Journalartikel

Combinatorial growth of MgxZn1-xO epilayers by chemical vapor deposition


AutorenlisteLautenschlaeger, Stefan; Sann, Joachim; Klar, Peter J.; Piechotka, M.; Meyer, Bruno K.

Jahr der Veröffentlichung2009

Seiten383-386

Zeitschriftphysica status solidi (b) – basic solid state physics

Bandnummer246

Heftnummer2

ISSN0370-1972

DOI Linkhttps://doi.org/10.1002/pssb.200844347

VerlagWiley


Abstract
It was our aim to explore the growth of Mg(x)Z(1-x)O epliayers on ZnO substrates using CVD at substrate temperature around 650 degrees C which is considerably lower than necessary for the MOCVD growth which requires substrate temperatures above 900 degrees C. Metallic precursors (Zn, Mg) were used together with NO2 as oxygen precursor. The Mg content was determined from the shift of longitudinal optical phonon line as a function of the Mg composition. The properties of the films were investigated by low temperature photoluminescence. Epitaxial MgxZn1-xO films with fixed Mg compositions required an individual adjustment of the Mg reservoir temperature. We, therefore, explored the possibility of a combinatorial growth i.e. achieving a Mg gradient within one sample. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim



Autoren/Herausgeber




Zitierstile

Harvard-ZitierstilLautenschlaeger, S., Sann, J., Klar, P., Piechotka, M. and Meyer, B. (2009) Combinatorial growth of MgxZn1-xO epilayers by chemical vapor deposition, physica status solidi (b) – basic solid state physics, 246(2), pp. 383-386. https://doi.org/10.1002/pssb.200844347

APA-ZitierstilLautenschlaeger, S., Sann, J., Klar, P., Piechotka, M., & Meyer, B. (2009). Combinatorial growth of MgxZn1-xO epilayers by chemical vapor deposition. physica status solidi (b) – basic solid state physics. 246(2), 383-386. https://doi.org/10.1002/pssb.200844347



Schlagwörter



Zuletzt aktualisiert 2025-17-07 um 11:12