Journal article

Combinatorial growth of MgxZn1-xO epilayers by chemical vapor deposition


Authors listLautenschlaeger, Stefan; Sann, Joachim; Klar, Peter J.; Piechotka, M.; Meyer, Bruno K.

Publication year2009

Pages383-386

Journalphysica status solidi (b) – basic solid state physics

Volume number246

Issue number2

ISSN0370-1972

DOI Linkhttps://doi.org/10.1002/pssb.200844347

PublisherWiley


Abstract
It was our aim to explore the growth of Mg(x)Z(1-x)O epliayers on ZnO substrates using CVD at substrate temperature around 650 degrees C which is considerably lower than necessary for the MOCVD growth which requires substrate temperatures above 900 degrees C. Metallic precursors (Zn, Mg) were used together with NO2 as oxygen precursor. The Mg content was determined from the shift of longitudinal optical phonon line as a function of the Mg composition. The properties of the films were investigated by low temperature photoluminescence. Epitaxial MgxZn1-xO films with fixed Mg compositions required an individual adjustment of the Mg reservoir temperature. We, therefore, explored the possibility of a combinatorial growth i.e. achieving a Mg gradient within one sample. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim



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Citation Styles

Harvard Citation styleLautenschlaeger, S., Sann, J., Klar, P., Piechotka, M. and Meyer, B. (2009) Combinatorial growth of MgxZn1-xO epilayers by chemical vapor deposition, physica status solidi (b) – basic solid state physics, 246(2), pp. 383-386. https://doi.org/10.1002/pssb.200844347

APA Citation styleLautenschlaeger, S., Sann, J., Klar, P., Piechotka, M., & Meyer, B. (2009). Combinatorial growth of MgxZn1-xO epilayers by chemical vapor deposition. physica status solidi (b) – basic solid state physics. 246(2), 383-386. https://doi.org/10.1002/pssb.200844347



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